发明名称 Ultra-small semiconductor devices and methods of fabricating and connecting said devices
摘要 Ultra-small semiconductor devices (20) and a method of fabrication including patterning the planar surface of a substrate (22) to form a pattern edge (23) (e.g. a mesa (24)) and consecutively forming a plurality of layers (25, 26, 27, 28, 29) of semiconductor material in overlying relationship to the pattern edge (23) so that a discontinuity is produced in the layers (25, 26, 27, 28, 29) and a first layer (25) on one side of the pattern edge (23) is aligned with and in electrical contact with a different layer (29) on the other side of the pattern edge (23).
申请公布号 EP0731502(A3) 申请公布日期 1999.01.20
申请号 EP19960103291 申请日期 1996.03.04
申请人 MOTOROLA, INC. 发明人 GORONKIN, HERBERT;TEHRANI, SAIED N.;WALTHER MARTIN;TSUI, RAYMOND
分类号 H01L29/06;H01L21/329;H01L27/06;H01L29/88 主分类号 H01L29/06
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