发明名称 MOISTURE-FREE SOG PROCESS
摘要 A method is disclosed for applying spin-on glass (SOG) to a substrate over low-melting point, non-refractory materials such as aluminum. The spin-on glass is applied to the substrate in a moisture-free environment to minimize reverse hydrolysis during curing. This results in the formation of higher quality films, especially from inorganic SOGs.
申请公布号 CA2017719(C) 申请公布日期 1999.01.19
申请号 CA19902017719 申请日期 1990.05.29
申请人 MITEL CORPORATION 发明人 OUELLET, LUC
分类号 B05C11/08;C04B41/85;H01L21/00;H01L21/312;H01L21/316;(IPC1-7):H01L21/56;B05D3/12;B05D5/12;H01L23/29 主分类号 B05C11/08
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