| 摘要 |
PROBLEM TO BE SOLVED: To obtain silicon powder capable of producing a high purity alkoxysilane, in particular trialkoxysilane applicable even to a semiconductor field by reaction with an alkyl alcohol without requiring a troublesome operation by heat-treating a powdery mixture of silicon powder with metal copper or a halogen-free copper compd. while mixing by mechanical stirring. SOLUTION: A powdery mixture of silicon powder with metal copper or a halogen-free copper compd. is heat-treated while mixing by mechanical stirring or it is heat-treated, mixed by mechanical stirring and heat-treated again. The metal copper or copper compd. preferably has <=20 μm particle size. The amt. of the metal copper or copper oxide is preferably 0.1-40 pts.wt. (expressed in terms of copper) based on 100 pts.wt. of the silicon powder. The ratio between the average particle diameter of the silicon powder and that of the metal copper or copper compd. is preferably 0.5:1 to 1,000:1. The heat treatment is carried out in an atmosphere of a nonoxidizing gas at >=800 deg.C for >=5 min residence time. |
