THIN WORKPIECE HOLDING DEVICE WHICH EMPLOYS STATIC PRESSURE MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a thin workpiece holding device having a drive mechanism which does not necessitate a carrier to hold a workpiece even if the workpiece is a thin workpiece having a thickness of 1 mm or less and does not cause dust when the workpiece is driven and rotated. SOLUTION: Both faces of a part of a thin workpiece 2 are held by a thin workpiece holding device having a hydrostatic pad part 4. The thin workpiece 2 is rotated by a rod 5 rotated by a drive source 6. A part of the workpiece 2 on thin side which protrudes from the thin workpiece hold device in this holding condition is inserted between double head grinding grindstones constituted by facing open sides of two cup type grindstones 1 to feed in both cup type grindstones 1 in the direction in which the thin workpiece 2 exists for grinding.