| 摘要 |
PROBLEM TO BE SOLVED: To automatically correct a positioning error and to prevent dropping of a substrate to be processed while it is conveyed by pushing back the substrate to be processed which juts out of a container, when a support plate is inserted into the container. SOLUTION: This device is designed to convey substrates W to be processed, by inserting a support plate 9 into a container 6 in which the substrates W to be processed are stored as they are stacked, and placing the substrates W to be processed on the support plate 9. In this case, a positioning error correcting member 23 for pushing back the substrate W to be processed, which is out of position as it juts out of the container 6, into the container 6 at the insertion of the support plate 9, by abutting to the edge of the substrate W to be processed, is provided on the main part of the support plate 9. |
