GENERATION OF WATER FOR PRODUCTION OF SEMICONDUCTOR PRODUCTION,申请号JP19970159571-传众专利搜索

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发明名称	GENERATION OF WATER FOR PRODUCTION OF SEMICONDUCTOR PRODUCTION
摘要
申请公布号	JPH1111902(A)	申请公布日期	1999.01.19
申请号	JP19970159571	申请日期	1997.06.17
申请人	OMI TADAHIRO;FUJIKIN:KK;HITACHI LTD	发明人	OMI TADAHIRO;MINAMI YUKIO;KAWADA KOJI;TANABE YOSHIKAZU;IKEDA SHINICHI;MORIMOTO AKIHIRO
分类号	C01B5/00;(IPC1-7):C01B5/00	主分类号	C01B5/00
代理机构		代理人
主权项
地址

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