| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater excellent in durability to electric current. SOLUTION: This ceramic heater 3 is produced by embedding a heat- generating resistor 32 consisting mainly of the silicates, carbides or nitrides of one or more kinds of metals selected from W, Ta, Nb, Ti, Zr, Hf, V, Mo, and Cr in a mixture of Si3 N4 with a rare earth element oxide as a sintering auxiliary and MoSi2 having a particle diameter of 0.1-3.0 μm as an additive and subsequently hot-pressing and sintering the combination. |
