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发明名称
FORMATION OF LARGE SIZED PRECISE STRUCTURE ON PLATE GLASS AND DEVICE THEREFOR
摘要
申请公布号
JPH1111964(A)
申请公布日期
1999.01.19
申请号
JP19980080056
申请日期
1998.03.27
申请人
CARL ZEISS:FA
发明人
OSTENDARP HEINRICH DR
分类号
C03B23/217;B01J19/12;C03C17/04;H01J9/24;(IPC1-7):C03B23/217
主分类号
C03B23/217
代理机构
代理人
主权项
地址
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