| 摘要 |
PROBLEM TO BE SOLVED: To provide a slurry circulation device which can automatically make the concentration of abrasive grains nearly constant while a workpiece is being cut, a wire saw provided with the slurry circulation device, and a recording medium for recording a program for operating of the slurry circulation device. SOLUTION: Slurry supplied to the cutting area of a workpiece 21 is measured by a viscometer arranged in a supply pipeline 37. When the viscosity of the slurry exceeds an upper limit, a third 46b is fully opened based on a control signal from a control section. A dispersion liquid flowmeter 47 measures the quantity of flowing dispersion liquid. When the predetermined quantity of the dispersion liquid is supplied in a slurry storage tank 36 according to the measured results, the third valve 46b is closed. Therefore, the concentration of free abrasive grains contained in the slurry is not increased relatively by the phenomenon in which the dispersion liquid is vaporized by the heat generated when the workpiece 21 is cut and hence the abrasive grains adhere to a wire 15 uniformly and the cutting efficiency of the workpiece 21 is not reduced. |
