| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to detect a composite type register mark by a method wherein the settings of the scanning intervals and the scanning directions of a detecting head on the intersecting point of a register mark, which is taught by an operator through the detecting head are so constituted as to be able to change. SOLUTION: By means of signals sent from reference position sensors 12 and 13, a mark detector 6 and a position detecting counter are reset so as to determine the reference position of a measurement. Next, a teaching is executed through an operator by placing the teaching lamp 7 of a detecting head 5 at the intersecting point of a register mark. At the same time, in response to the shape of the register mark, conditions are set by a going-round condition inputting means 22. After that, a scanning with the detecting head 5 is executed so as to measure the actual position of the register mark by obtaining the information of the position of the register mark with a calculating means 19. Thus, the detection of the composite type register mark becomes possible and, at the same time, the limitation on the shape of the register mark as a detecting object can be made as small as possible. |
