发明名称 |
MICRO-DISPLACEMENT ELEMENT, AND SCANNING TUNNELING MICROSCOPE AND INFORMATION PROCESSING APPARATUS USING SAME |
摘要 |
A micro-displacement element comprises a unimorph cantilever having a piezoelectric thin film, a pair of electrodes between which the piezoelectric thin film is sandwiched, and an elastic thin film. One end of the cantilever is supported by a support, and the other end thereof is provided with a probe. The micro-displacement element can be used particularly as an array of plural elements, for an information processing apparatus in which the element faces to a recording medium such that an information recording pulse voltage or an information reproducing bias voltage can be applied to between the probe and the recording medium.
|
申请公布号 |
CA2069702(C) |
申请公布日期 |
1999.01.19 |
申请号 |
CA19922069702 |
申请日期 |
1992.05.27 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YAMAMOTO, KEISUKE;HIRAI, YUTAKA;NAKAYAMA, MASARU;YAGI, TAKAYUKI;KASANUKI, YUJI;SUZUKI, YOSHIO |
分类号 |
B81B3/00;G01N27/00;G01N37/00;G01Q20/04;G01Q30/02;G01Q60/10;G01Q60/16;G01Q70/06;G01Q70/14;G01Q80/00;G11B9/00;G11B9/14;H01L41/09;H01L41/18;H02N2/00;(IPC1-7):G11B9/00;G01B7/28 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|