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发明名称
APPARATUS AND METHOD FOR TREATING FLAT SUBSTRATES UNDER REDUCED PRESSURE
摘要
申请公布号
KR0166973(B1)
申请公布日期
1999.01.15
申请号
KR19910070013
申请日期
1991.01.07
申请人
PHILIPS ELECTRONICS N.V.
发明人
VISSER, JAN
分类号
B23Q3/08;B65G49/00;C23C14/50;C23C14/54;C30B25/10;C30B25/12;C30B31/14;H01L21/302;H01L21/3065;H01L21/683;H01L21/687;(IPC1-7):C30B25/10
主分类号
B23Q3/08
代理机构
代理人
主权项
地址
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