PROCESS FOR THE PREPARATION OF ALUMINIUM OXIDE FILM FROM ALKYL ACID DIALKYLALUMINIUM BY CHEMICAL VAPOR DEPOSITION,申请号KR19950046455-传众专利搜索

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发明名称	PROCESS FOR THE PREPARATION OF ALUMINIUM OXIDE FILM FROM ALKYL ACID DIALKYLALUMINIUM BY CHEMICAL VAPOR DEPOSITION
摘要
申请公布号	KR0164984(B1)	申请公布日期	1999.01.15
申请号	KR19950046455	申请日期	1995.12.04
申请人	KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY	发明人	KIM, YUN-SOO;KO, WON-YONG;KOO, SOO-JIN
分类号	C23C16/40;(IPC1-7):C30B29/20	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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