PROCEDE DE FABRICATION D'UNE MATRICE DE FILTRES OPTIQUES, MATRICE DE FILTRES OPTIQUES ET DISPOSITIF DE SPECTROMETRIE UTILISANT UNE TELLE MATRICE

摘要

The invention concerns a method for making a filter having a plurality of filter regions with different degrees of thickness, consisting in: a) forming an optical structure comprising at least one optical coating (100); b) carrying out local thinning treatments of said optical structure in treatment regions (110, 118), each treatment region having with at least another treatment region a partially overlapping zone (120). The thinning treatment can comprise the formation of a mask and etching operations. The method is useful in particular for making filter matrix for spectroscopy instruments.