发明名称 ALUMINUM NITRIDE SINTER AND PROCESS FOR THE PRODUCTION THEREOF
摘要 The aluminum nitride sintered body according to the present invention comprises 1 - 10 % by weight of at least one element selected from a group consisting of a group IIIa element listed in periodic table, Ca, Sr and Ba in terms of the amount of an oxide thereof, 0.2 - 2.0 % by weight of boron carbide, at most 0.2 % by weight of at least one silicon compound selected from a group consisting of SiO2, Si3N4, SiC, Si2N2O, beta -Sialon, alpha -Sialon and poly-type aluminum nitride (Al-Si-O-N) in terms of the amount of Si component, and the balance of aluminum nitride. According to the foregoing structure, there is available an AlN sintered body in which grain growth of the AlN sintered body is inhibited; the sintered body structure is fined; coupling of grain boundaries and crystal grains is intensified, thereby improving both strength and fracture toughness of the sintered body and increasing mechanical strength and fracture toughness without impairing heat radiation characteristics intrinsic to aluminum nitride.
申请公布号 KR0168303(B1) 申请公布日期 1999.01.15
申请号 KR19960074733 申请日期 1996.08.28
申请人 TOSHIBA KK 发明人 KOMATSU, MICHIYASU;SHIRAI, TAKAO
分类号 C04B35/581;H01L23/15;H01L23/373;(IPC1-7):C04B35/58;H01L21/52;H01L23/12 主分类号 C04B35/581
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