发明名称 Optical distance measuring system using precision interferometers
摘要 The optical system for measuring variations in distance with precision comprises three interferometers (16,30,44) connected in series. The first interferometer (16) is illuminated with polychromatic light and has a path difference representing the distance, L, to be measured. The second interferometer (30) has an optical path difference representing a fixed reference distance (L0). The third interferometer (44) has an optical path difference which is adjustable between a null value and the distance, E, which is the difference between the distance to be measured (L) and the reference distance (L0). A photosensitive detector (54) receives the output from the third interferometer. The third interferometer is illuminated by a stabilised source, such as a frequency stabilised laser.
申请公布号 FR2765964(A1) 申请公布日期 1999.01.15
申请号 FR19970008645 申请日期 1997.07.08
申请人 BERTIN ET CIE 发明人 LEQUIME MICHEL;LEBLAY PIERRICK;GUERIN JEAN JACQUES
分类号 G01B9/02;G01D5/26;(IPC1-7):G01B9/02 主分类号 G01B9/02
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