METHOD AND APPARATUS FOR MASKLESS SEMICONDUCTOR AND LIQUID CRYSTAL DISPLAY INSPECTION

摘要

Image primitive based maskless semiconductor wafer and liquid crystal display panel inspection by the characterization of wafer patterns. Potential defects (212) are detected as exceptions to the rules of general pattern surface structure. The wafer or led structure is encoded into multiple profiles of a set of primitive characterization modules (210, 220, 230). Primitive profiles are correlated with potential defects along with aligned images for comparison.