| 摘要 |
<p>A surface inspecting method and a surface inspecting device for inspecting a broad range of a surface to be inspected without increasing the size of the lenses of an object-side telecentric optical system. To inspect the surface of the object by observing the light reflected by the object through the object-side telecentric optical system or the image-side telecentric optical system, the optical axis of the object-side telecentric optical system or the image-side telecentric optical system is inclined with respect to the normal of the object.</p> |
