| 发明名称 |
METHOD FOR OPTICAL INSPECTION AND LITHOGRAPHY |
| 摘要 |
A process for illuminating a structured surface which contains a photosensitive material. The structured surface is immersed in a super-critical fluid while the structure is illuminated.
|
| 申请公布号 |
WO9901797(A1) |
申请公布日期 |
1999.01.14 |
| 申请号 |
WO1998US13650 |
申请日期 |
1998.07.02 |
| 申请人 |
BATCHELDER, JOHN, SAMUEL |
发明人 |
BATCHELDER, JOHN, SAMUEL |
| 分类号 |
G03F7/20;(IPC1-7):G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
