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发明名称
FLACHEN MAGNETRONZERSTÄUBUNGSANLAGE
摘要
申请公布号
DE69320151(T2)
申请公布日期
1999.01.14
申请号
DE19936020151T
申请日期
1993.05.25
申请人
MANLEY, KELLEY, BOULDER, COL., US
发明人
MANLEY, BARRY W., BOULDER, COLORADO 80301, US
分类号
C23C14/35;H01J37/34;(IPC1-7):C23C14/35;C23C14/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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