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发明名称
摘要
申请公布号
JP2847027(B2)
申请公布日期
1999.01.13
申请号
JP19930341168
申请日期
1993.12.13
申请人
EI TEI ANDO TEI CORP
发明人
YOO SAMYUERU OOBENGU;EDOWAADO JEE BAJIDA
分类号
H01L21/304;H01L21/306;H01L21/324;(IPC1-7):H01L21/304
主分类号
H01L21/304
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代理人
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