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发明名称
摘要
申请公布号	JP2847228(B2)	申请公布日期	1999.01.13
申请号	JP19930323625	申请日期	1993.12.22
申请人	SUMITOMO KINZOKU KOGYO KK	发明人	MINAGAWA KAZUHIRO;ARAHORI TADAHISA;KOIKE YASUO
分类号	G01N21/88;C23C14/50;G01N21/94;G01N21/956;H01L21/31;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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