发明名称 A LASER PROCESSING METHOD FOR A GLASS SUBSTRATE, AND A DIFFRACTION GRATING AND A MICROLENS ARRAY OBTAINED THEREFROM
摘要 <p>A laser processing method for removing glass by melting, evaporation or oblation from sheet-like glass substrate for forming microscopic concavities and convexities. Diffraction grating and planar microlens array obtained thereby. <IMAGE></p>
申请公布号 EP0889855(A1) 申请公布日期 1999.01.13
申请号 EP19970907322 申请日期 1997.03.14
申请人 NIPPON SHEET GLASS CO., LTD. 发明人 KOYAMA, TADASHI;TSUNETOMO, KEIJI;OIKAWA, MASAHIRO;HAMANAKA, KENJIRO
分类号 B23K26/06;C03B23/00;C03B23/02;C03B29/00;C03B29/02;C03C23/00;G02B3/00;G02B6/32;G02B6/36;(IPC1-7):C03B23/00;B23K26/00 主分类号 B23K26/06
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