MANUFACTURE OF THIN FILM TRANSISTOR,申请号JP19970161472-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号	JPH118195(A)	申请公布日期	1999.01.12
申请号	JP19970161472	申请日期	1997.06.18
申请人	SEIKO EPSON CORP	发明人	AZUMA SEIICHIRO
分类号	H01L21/20;H01L21/02;H01L21/268;H01L21/336;H01L27/12;H01L29/786;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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