| 摘要 |
PROBLEM TO BE SOLVED: To improve strength, fracture toughness value, and thermal shock resistance and also to improve the orientation property and film-forming velocity of an MgO film formed by a sputtering method. SOLUTION: The target composed essentially of MgO is constituted by dispersing 1-25 vol.% of LaB6 grains 2 in an MgO matrix having crystalline grains 1 of 0.5-100 μm average crystalline grain size. This target can be produced by mixing an MgO powder and LaB6 powder wet, drying the resultant mixture by heating under reduced pressure, crushing the mixture dry, compacting the resultant dry-crushed powder mixture, and further sintering the resultant green compact at 1300-1650 deg.C. |
