发明名称 |
SEPARATION DEVICE FOR SAMPLE AND METHOD THEREOF AND PRODUCTION OF BOARD |
摘要 |
PROBLEM TO BE SOLVED: To provide a device for separating the porous layer from a laminated board having a porous layer. SOLUTION: A laminated board 420 having the porous layer 420b is supported while it is rotated with board holding parts 404, 406. A high speed and high pressure liquid or water (a jet constitutional medium) is jetted through a jetting nozzle 418, and the jet is inserted into the laminated board 420 via a guide part 415. The guide part 415 is adjusted at such a position in the direction of X axis by a motor 417 that the jet is concentrated in the vicinity of a laminated surface of the laminated board 420. |
申请公布号 |
JPH115064(A) |
申请公布日期 |
1999.01.12 |
申请号 |
JP19970159038 |
申请日期 |
1997.06.16 |
申请人 |
CANON INC |
发明人 |
OMI KAZUAKI;SAKAGUCHI KIYOBUMI;YANAGIDA KAZUTAKA;YONEHARA TAKAO |
分类号 |
B07B13/00;H01L21/00;H01L21/02;H01L27/12;(IPC1-7):B07B13/00 |
主分类号 |
B07B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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