发明名称 SEPARATION DEVICE FOR SAMPLE AND METHOD THEREOF AND PRODUCTION OF BOARD
摘要 PROBLEM TO BE SOLVED: To provide a device for separating the porous layer from a laminated board having a porous layer. SOLUTION: A laminated board 420 having the porous layer 420b is supported while it is rotated with board holding parts 404, 406. A high speed and high pressure liquid or water (a jet constitutional medium) is jetted through a jetting nozzle 418, and the jet is inserted into the laminated board 420 via a guide part 415. The guide part 415 is adjusted at such a position in the direction of X axis by a motor 417 that the jet is concentrated in the vicinity of a laminated surface of the laminated board 420.
申请公布号 JPH115064(A) 申请公布日期 1999.01.12
申请号 JP19970159038 申请日期 1997.06.16
申请人 CANON INC 发明人 OMI KAZUAKI;SAKAGUCHI KIYOBUMI;YANAGIDA KAZUTAKA;YONEHARA TAKAO
分类号 B07B13/00;H01L21/00;H01L21/02;H01L27/12;(IPC1-7):B07B13/00 主分类号 B07B13/00
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