发明名称 MAGNETIC HEAD AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To produce no recess on the side opposite to a magnetic recording medium, to have strength against charge and to increase precision in a magnetic pole width, in regard to the manufacture of a magnetic head. SOLUTION: The width of a pole tip 15a is narrowed by forming a lower magnetic pole 3 on a wafer 1, forming a nonmagnetic layer 8 on the lower magnetic pole 3, forming on the nonmagnetic layer 8 an upper magnetic pole 15 having a pole tip 15a with a narrow tip end, emitting a convergent ion beam in the thickness direction to the side of the pole tip 15a, to the non magnetic layer 8 immediately below it and to the lower magnetic pole, and also emitting while moving from the outside of the pole tip 15a toward the side. Simultaneously, a recessed part 7a is formed in the lower magnetic pole 3 in an area from immediately below the side of the pole tip 15a toward the outside, while the width of the lower magnetic pole 7 held between the recessed parts 7a is made equal to that of the pole tip 15a, forming a nonmagnetic protective layer 16 which fills the recessed parts 7a and which also covers the upper and the lower magnetic poles 15, 7.
申请公布号 JPH117608(A) 申请公布日期 1999.01.12
申请号 JP19970350593 申请日期 1997.12.19
申请人 FUJITSU LTD 发明人 KOSHIKAWA YOSHIO;NAGAI ATSUHIKO
分类号 G11B5/187;G11B5/31;G11B5/39;G11B5/40;(IPC1-7):G11B5/31 主分类号 G11B5/187
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