| 发明名称 |
Vertical wafer boat |
| 摘要 |
A radius of 0.1-1 mm is provided at a corner between a bottom of each of semiconductor wafer inserting and supporting grooves and a base of a supporting piece between the supporting groove and a supporting groove adjacent thereto, which are formed in bars connecting upper and lower end plates of a vertical wafer boat.
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| 申请公布号 |
US5858103(A) |
申请公布日期 |
1999.01.12 |
| 申请号 |
US19970855950 |
申请日期 |
1997.05.14 |
| 申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
NAKAJIMA, TOSHIO;YAMAMOTO, HISAO |
| 分类号 |
H01L21/683;H01L21/205;H01L21/22;H01L21/31;H01L21/673;(IPC1-7):C23C16/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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