| 摘要 |
PROBLEM TO BE SOLVED: To provide a deformable mirror which is capable of maintaining a mirror surface in its highly accurately deformed state with easy control and without receiving little influence from an environmental temperature, which is also manufactured at low cost to have a small and simple structure. SOLUTION: This mirror is provided with a flexible member 2 having a reflection surface for reflecting an incident light, a reference surface substate 6 having a recessed and projecting surface 3 forming a space for permitting the elastic deformation of the flexible member 2, arranged oppositely to the rearside of the flexible member, stuck to the outer peripheral edge part of the flexible member 2 for supporting it and a silicon substrate 50 for holding the flexible member 2 with the reference surface substrate 6. In this case, in the deformable mirror for sticking the flexible member 2 to the recessed and projecting surface 3 and then deforming the flexible member 2, the opening part 53 of the reference surface substate 6 is formed to be an octagon. |
