| 摘要 |
PROBLEM TO BE SOLVED: To suppress offset temperature drift in an angular velocity sensor that has a vibrator in a tuning fork shape consisting of a piezoelectric body or in a shape where a plurality of tuning forks are synthesized. SOLUTION: A sensor is formed in a tuning fork shape by a piezoelectric body and has a vibrator where driving electrodes 12a and 12b and detection electrodes 22a and 22b are provided on an outer wall surface. In this case, a vibrator 2 is formed so that a ratio fd/fs of a driving resonance frequency fd where voltage is applied to the driving electrodes 12a and 12b and the vibrator 2 is excited in Y-axis direction to a resonance frequency fs in X-axis direction where an angular velocity is detected via the detection electrodes 22a and 22b is set to a value that is at least 0.9 and is 0.96 or less or is at least 0.4 and is 1.1 or less, and a ratio G/ts of the distance G between electrodes in Z-axis direction of the driving electrodes 12a and 12b and the detection electrodes 22a and 22b at each of arm parts 4 and 6 to a thickness ts in the X-axis direction of the vibrator 2 is set to a value that is at least 1.4. As a result, the offset temperature drift of the detection signal can be reduced. Also, the fd/fs should be set to the above range in a comb-shaped or H-shaped vibrator where the tuning fork is combined. |
