| 摘要 |
<p>PROBLEM TO BE SOLVED: To produce a highly accurate wafer boat which is easily adaptable, even to a large diameter wafer easily at a low cost by constructing a wafer supporting part of a plurality of planar supporting members, formed independent ly from a pole and fixing the supporting members individually to the pole. SOLUTION: A pole 12 is a rod member having a rectangular cross-section, provided, in the side face thereof, with a large number of parallel fixing grooves in the breadthwise direction at specified intervals. A wafer-supporting part is constructed of planar claw-type supporting members 13 produced independently from the pole 12 and set therein individually. In this case, the supporting member 13 is inserted into the fixing groove in the pole 12 from the leg part side, until the bottom of a insertion hole in the supporting member 13 abuts against the pole 12. Subsequently, a retaining member is applied from above and the foot thereof is stopped in the engaging groove of the supporting member 13. The supporting members 13 are fixed in the fixing grooves of the pole 12 sequentially and individually.</p> |
