| 摘要 |
PROBLEM TO BE SOLVED: To perform accurate alignment in spite of having distortion on a main body structure. SOLUTION: This aligner is provided with substrate stages 13 and 15 which retain and move a structure 18, a position measuring mean 14 which measures the position of the above-mentioned substrate stages, and a control means 16 which performs the driving control of the substrate stages 13 and 15 to align the substrate 18. This aligner aligns the substrate 18 with an original sheet 2, and the pattern of the original sheet 2 is exposed on the substrate 18. In this case, the above-mentioned position measuring means 14 is provided with a measuring means 9 which measures the distortion of a fixed structure 8, and the control means 16 positions the substrate 18 by controlling the driving of the stages 13 and 15, taking the measurement distortion into consideration. |
