发明名称 Image formation utilizing photosensitive compositions containing low metal content p-cresol oligomers
摘要 Process for producing a photosensitizer comprising a diazo ester of a p-cresol oligomer where at least one of the hydroxy groups on the p-cresol ring has been esterified with diazo-sulfonyl chloride comprising from about 60 to 100 mole % 2,1,4 or 2,1,5-diazo sulfonyl chloride, or a mixture thereof; and a photoresist comprising an admixture of the photosensitizer, which is present in the photoresist composition in an amount sufficient to uniformly photosensitive the photoresist composition, a water insoluble, aqueous alkali soluble novolak resin, the novolak resin being present in the photoresist composition in an amount sufficient to form a substantially uniform photoresist composition, and a suitable solvent.
申请公布号 US5858627(A) 申请公布日期 1999.01.12
申请号 US19970920564 申请日期 1997.08.29
申请人 CLARIANT FINANCE (BVI) LIMITED 发明人 RAHMAN, M. DALIL;KHANNA, DINESH N.;AUBIN, DANIEL;MCKENZIE, DOUGLAS
分类号 G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/38 主分类号 G03F7/022
代理机构 代理人
主权项
地址