| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the stray capacitance between wiring lines and improve the reliability of vacuum sealing. SOLUTION: An emitter array is formed by molding. A gate electrode material film is pattern formed on an element base 10 as gate electrodes 31 separated every picture element area within the element area. An emitter electrode material film having emitters 8 formed so as to be exposed to the opening parts 41 of the gate electrodes 31 is pattern formed as a plurality of emitter wiring lines 71 limited within the element area. A conductive adhesive layer 9 is also pattern formed simultaneously with the emitter wiring lines 71. The gate electrodes 31 are led out of the element area by gate wiring lines 16. The emitter wiring lines 71 are led out of the element area by emitter leading wiring lines 17.</p> |
