发明名称 |
Method of making thin film transistors |
摘要 |
A thin film field effect transistor includes: a) a thin film channel region; b) a pair of opposing electrically conductive first and second source/drain regions adjacent the thin film channel region; c) a gate insulator and a gate positioned adjacent the thin film channel region for electrically energizing the channel region to switch on the thin film field effect transistor; d) the first source/drain region having a first thickness, the second source/drain region having a second thickness, the channel region having a third thickness; at least one of the first and second thicknesses being greater than the third thickness. Methods are disclosed for making thin field effect transistors.
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申请公布号 |
US5858821(A) |
申请公布日期 |
1999.01.12 |
申请号 |
US19960706641 |
申请日期 |
1996.09.05 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
DENNISON, CHARLES H.;MANNING, MONTE |
分类号 |
H01L21/336;H01L21/8244;H01L27/11;H01L29/786;(IPC1-7):H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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