| 摘要 |
PROBLEM TO BE SOLVED: To enable the irradiation of objects with highly intense and uniform X rays in a large area by composing an optical system of a plane mirror and a nonplanar mirror and using for the latter the one whose surface form is described by a polynomial expression including a cubic or higher term. SOLUTION: X rays 2 radiated from an X-ray source 1 are incident on a nonplanar mirror 3 at an incidence angleθ1 and are reflected in compliance with the law of regular reflection. Then, the X rays 2 are incident on a plane mirror 4 at an incidence angleθ2 (the same angle as the reflection angle), are regularly reflected by it and are projected on an irradiation surface 5. On this occasion, an X-ray optical system can be composed that combines both high intensity, the irradiation of a large area and the uniformity of high intensity by setting the geometry of the nonplanar mirror 3 described by a function where at least one term includes a term expressed by 1+n+n>=3 in a linear combination of x<1> , y<m> and z<n> when space coordinates are represented by x, y and z. Moreover, the use of the plane mirror 4 for one of the two mirrors can facilitate working and lower the price of it to realize the low price of the whole optical system. |
