| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the removed unnecessary stuff from polluting a work again and from polluting a window for introducing the laser beam, and to prevent the transmissivity of the refrigerant from being dropped by providing outside a gas blow- out cylinder a gas sucking/discharging means to such the unnecessary stuff removed from the work together with the gas and discharge the stuff outside a treatment chamber. SOLUTION: The excimer laser beam 10 oscillated from a laser beam irradiation device is introduced into a treatment chamber 2 of a laser beam cleaning device 1 through a window 3 for introducing the laser beam, and a work 6 is irradiated with the laser beam. The inert gas is fed from a gas feed device to a gas feed pipe 4a, and at the same time, an exhaust cylinder 7 is evacuated by a sucking device through a discharge port 7a. The introduced gas 40 passes through the same route as that of the laser beam 10, and blown against the laser beam irradiation part of the work 6 from the tip of the blowout cylinder 4 and the part in the vicinity thereof, the impurities and unnecessary thin films attached to a surface part of the work 6 are detached and moved together with the gas 40, sucked to the exhaust cylinder 7, and carried outside of the treatment chamber 2 as the exhaust gas.</p> |
