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发明名称
摘要
申请公布号	JP2845186(B2)	申请公布日期	1999.01.13
申请号	JP19950316329	申请日期	1995.12.05
申请人	NIPPON DENKI KK	发明人	UCHIDA TETSUYA
分类号	H01L29/78;H01L21/336;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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