VIBRATION GYROSCOPE

摘要

A piezoelectric unit (80) is composed of piezoelectric elements (60 and 70). A driving electrode (22) is provided over the whole surface of the lower surface of the piezoelectric element (60). A driving electrode (21) is provided over the whole surface between the piezoelectric elements (60 and 70). The driving electrodes (21 and 22) are connected to a driving signal source (90). Detection electrodes (31-34) are provided on the upper surface (71) of the piezoelectric element (70). The detection electrodes (31 and 34) are connected to one of output terminals (50) and the detection electrodes (32 and 33) are connected to the other of the output electrodes (50). The piezoelectric element (70) is polarized upward and the piezoelectric element (60) is polarized downward. A vertical 1st order vibration is driven in a longitudinal direction L and a 2nd order bending vibration is detected by the detection electrodes (31-34) and a voltage proportional to a Coriolis force (rotational angular velocity) is outputted. With this constitution, a vibration gyroscope which does not need the sticking to facilitate the cost reduction and whose thickness and width can be reduced can be realized.