TRANSDERMAL PROBE WITH AN ISOTROPICALLY ETCHED TIP, AND METHOD OF FABRICATING SUCH A DEVICE

摘要

A probe (20) includes an elongated body (22) with a top surface (26), a bottom surface (34), a frist sidewall (36) between the top surface (26) and the bottom surface (34), and a second sidewall (38) between the top surface (26) and the bottom surface (34). An end (40) is defined by the bottom surface (34) converging into a tip, an isotropic etched portion of the frist sidewall (36) converging into the tip (34), and an isotropic etched portion of the second wall (38) converting into the tip (34). The elongated body is less than approximately 700 micrometers wide, and less than approximately 200 micrometers thick. The elongated body may incorporate a fluid channel. The elongated body may be formed of silicon that is not doped with boron.