Distance between tool end and processable object surface measuring method

摘要

The method involves using the tool end part directly as a measurement medium for an electrical voltage, current, capacitance or frequency measurement. A calibration curve is generated which reproduces the relationship between electrical measurement parameter and the distance between the tool end part and the object surface or object (T). The conducting surface(s) is or are electrically charged and the voltage between the conducting regions of the tool end part and object or object surface measured (4). A calibration curve is generated relating the measured voltage and distance values.