MULTI-LAYER RESISTOR FOR AN EMITTING DEVICE

摘要

An electron-emitting device employs a multi-layer resistor (46). A lower layer (48) of the resistor overlies an emitter electrode (42). An electron-emissive element (54) overlies an upper layer (50) of the resistor. The two resistive layers are of different chemical composition. The upper resistive layer is typically formed with cermet. The lower resistive layer is typically formed with a silicon-carbon compound. In fabricating the device, the upper resistive layer normally serves as an etch stop for protecting the lower resistive layer and the emitter electrode during the etch of an overlying dielectric layer (52) to form an opening (56) in which the electron-emissive element is later provided.