Probe station with integrated environment control enclosure,申请号EP19930303937-传众专利搜索

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发明名称	Probe station with integrated environment control enclosure
摘要
申请公布号	EP0573183(B1)	申请公布日期	1999.01.07
申请号	EP19930303937	申请日期	1993.05.20
申请人	CASCADE MICROTECH, INC.	发明人	HARWOOD, WARREN K.;KOXXY, MARTIN J.;TERVO, PAUL A.
分类号	H01L21/66;H01L21/68;H01L21/683;(IPC1-7):H01L21/00	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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