Characteristic value simulator for semiconductor integrated circuit

摘要

The simulator provides variations in characteristic values of numerous integrated circuits on a semiconductor substrate by influencing a number of processing steps. A simulation data generator (5) provides simulating data for working according to measuring data of numerous preset parts on the substrate after processing. A simulator (2) calculates the characteristic values of the integrated circuits according to the simulation data, while a display (8) indicates the variations in the characteristic values as a distribution on the semiconductor substrate.