Interferometric method to measure phase difference between superimposed optical waves

摘要

The method involves feeding a signal wave (3) and at least one reference wave (4), which is coherent with respect to it, together. The waves are measured interferometrically and evaluated in common. The intensity of at least one part-beam coupled out of the signal or the reference waves is measured simultaneously with the interferometric measurement and evaluation. This enables the phase difference between the signal wave and the reference waves to be measured. For a nonlinear sensitivity of the detector, a correction value is calculated according to the sensitivity of the detector value of the part wave.