Nitride ceramic powder or ceramic precursor production

摘要

In the production of nitride ceramic powders or ceramic precursors by gas phase reaction of volatile metal chlorides and/or chloride-containing volatile metal compounds with ammonia, the reactants are mixed prior to reaction at 340-1000 deg C. Preferably, the process is carried out in a reactor having mixing and reaction zones which immediately follow one another and which have thermally decoupled walls.