Miniaturised thermoelectric thin film detector

摘要

The detector has a silicon frame which supports an inorganic thin film membrane. On the membrane is located a thin film thermometric pile formed by a several thermocouples equal in length, distributed radially symmetrical and connected in series. The individual thermocouple conductors are brought out on one side of the silicon frame. A silicon chip is implanted in which is provided an octagonal zone to form the unsupported membrane. The side edges of this zone formed by the crystal planes of the silicon form tangents to an imaginary circle enclosed by the octagon