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发明名称
COAT THICKNESS ADJUSTING DEVICE FOR COATING SPUTTERING DEVICE
摘要
申请公布号
JPH113653(A)
申请公布日期
1999.01.06
申请号
JP19970151451
申请日期
1997.06.10
申请人
SONY CORP
发明人
MIZUNO YASUHIRO
分类号
C23C14/34;C23C14/54;H01J9/20;(IPC1-7):H01J9/20
主分类号
C23C14/34
代理机构
代理人
主权项
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