| 摘要 |
PROBLEM TO BE SOLVED: To form an inductor for high frequency which shows a high Q-value by forming an electrode formed on an insulator, so that the maximum and, minimum widths of the specific-length part of the electrode may meet a specific relation. SOLUTION: An electrode pattern is formed so that the maximum width (W1) and minimum width (W2) of an electrode formed on an insulator in 60% length part of the electrode, in which an electrode width of about 100μm or less continues may meet a relation 0.15<=W2/W1<=0.98. The electrode pattern is formed to meet this relation even when the width of the electrode is <=40μm and <=30μm. The thickness of the electrode is adjusted to >=4μm, preferably, to >=15μm. The electrode pattern and an insulating layer pattern are formed by using photosensitive paste through a photolithography process. Therefore, an inductor which shows a high Q-value in a high-frequency domain can be obtained.
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