| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrating gyro having a PZT thin-film bimorph structure which can readily provide a number of bimorph structures, can be formed into a small bimorph structure, and resists twisting. SOLUTION: A vibrating gyro 1 comprises a pair of parallel flat-plate structures 2, 3 connected in series along the vertical direction. The parallel flat plate structure 2 comprises flat plate-shaped piezoelectric elements 4 constructed of a pair of bimorph structures opposed and secured to each other with an adhesive, with prism-shaped insulating spacers 5 sandwiched between the upper and lower ends thereof. Each of the piezoelectric elements 4 has a PZT thin film 7 formed on each side of a base 6 made from titanium into a flat plate shape of uniform thickness, with an electrode film 8 formed bn the PZT thin film 7 on each side. The parallel flat plate structures 2, 3 are placed in such a way that the sides on which the electrode films 8 are formed are perpendicular to each other, and are bonded together with an adhesive at their upper and lower end faces. |
